1995 Tel MK7-S
used
- Manufacturer: Tokyo Electron - TEL
missing parts: 2 resist pumps, 1Developer Line Add. Info: TYP AM/C Typ FC-9801F#1SD/HD Typ CommandpostSystem Vers. MK8G2.38Alarm File ALM00166.OENSp. Al.File AL00TT.OENGEM 1.72Lines 1(3)Pumps 1xminiEBR programabl...
Regensburg, Germany- Regensburg, Germany
1999 Trikon Tech Ltd. Sigma FxP200 RevA
used
- Manufacturer: Sigma
It´s a Trikon Sigma FxP200 with 4 Std RevA DEP Chambers, 1 RevA HSE (not complete), 1 MKII Heat Chamber. Brooks MX800 Platform with 2 Swing Out VCE6 Loadlocks. The Platform is upgradet from T5 Controller (MX800) ...
Regensburg, Germany2017 PVA SPA Waferscale WS300 (MET902-03)
used
Waferscale for 8" STD / 8" Taiko / 12" STD/ 12" Taiko Wafer weighing system - Filmthickness
Regensburg, Germany2015 PVA SPA Waferscale WS200 (MET902-02)
used
Waferscale for 8" Wafer STD Wafer weighing system - Filmthickness
Regensburg, Germany2001 Canon 5500iz
used
- Manufacturer: Canon
'- 12" Standard Wafer Chuck and 12" wafer handling system - SMIF type reticle loading ports and reticle changer unit- Pellicle Particle checker installed - Hg-lamp will be rmoved prior shipping- Coolant will be r...
Regensburg, Germany- Regensburg, Germany
- Regensburg, Germany
- Regensburg, Germany
- Regensburg, Germany
2016 Nexx Apollo PVD
used
The Nexx Apollo PVD system is a fully automated Physical Vapor Deposition (PVD) tool using a multiple wafer multiple chamber design. The system deposits thin metal films used in interconnect metallization on wafe...
Regensburg, Germany- Regensburg, Germany
1995 CDE CDE80/3 Plasma Etch
used
- Manufacturer: CDE
The system was in production until February 2025. Plasma Etch
Regensburg, Germany2008 ASM Advance 400
used
- Manufacturer: ASM
- Model: ADVANCE 400
ASM Furnace Vertical - Advance 400 2 Reactor atmospheric Robot defect and need service
Regensburg, Germany1995 Fusion Systems Inc. 200 PCU
used
- Manufacturer: Fusion Systems Inc.
Die Anlage war bis zur Deinstallation in Jänner 2024 in Produktion. FUSION 150/7D
Regensburg, Germany