LAM TCP 9600SE in Yongin-si, Gyeonggi-do, South Korea
Used
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Specifications
- Condition
- used
- Stock number
- 10060
- Wafer size
- 200mm
- Subcategory
- Etch equipment
- Subcategory 2
- Front end equipment
- Listing ID
- 54225679
Description
Metal Etcher
- TMP : Alcatel ATH-1300M,
Controller : Alcatel ACT-1300M
- RF Generator : 3155027-000N
- N2 Ballast : N2 20SCCM
- DIP Board
- Multi Power Supply
- Mini Match
- Wafer Holder
- 12 Channel Heater
- Hard disk interface
- Both Indexer
- DSQ chamber : RF coil & match
- Gas configuration : UNIT UFC-1660 MFCs
. BCl3/100SCCM
. Cl2/200SCCM
. O2/200SCCM
. N2/50SCCM
. CF4/20SCCM
.
Ar
/200SCCM
. O2/2SLM
. CF4/100SCCM
- Chamber Manometer : CMH4-M11S19-EMC/685-091078-011
- DSQ Manometer CMLA-11S17/685-090767-001
- Gas Feedthrough
- AC Rack : 208VAC 3 Phase 5Kw
- EPD Detector 853-001983-011
Services offered by seller
This Seller offers repair & maintenance services
This seller offers spare parts
Interested in this machine?
This seller has been contacted 2 times in the last week.