Building Filters
 - AXCELIS/FUSION 200ACU- Manufacturer: Axcelis
 Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 - Tokyo Electron Ltd. Telius 305 SCCM- Manufacturer: Tokyo Electron - TEL
- Model: TELIUS 305 SCCM
 - Wafer size: 12" Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 - TECSEM TWS300- Manufacturer: TECSEM
 Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 Yongin-si, South Korea Yongin-si, South Korea
 - 1994 TEL TE8500- Manufacturer: Tokyo Electron - TEL
- Model: TE8500
 Yongin-si, South Korea
