Used polarization controllers

LAM EXELAN Dual Frequency 272 MHz Etch Tool with Plasma Monitoring

• Manufacturer: Lam Research - Novellus
• Model: EXELAN

One 8 Inch Chamber Osaka Helical Groove Vacuum Turbo Pump & Controller Model TS443EN ENI Dual Frequency RF Generator Model OB1-03, and Match set. RF output 2.5kW @1.8 MHz and 10kW max at 27MHz Including Plasma mo...