2008 LAM Research Corp. 2300 Kiyo
- Manufacturer: Lam Research - Novellus
- Model: 2300 KIYO
Semiconductor ETC Chamber with RF Cart Incl. Gasbox and Rocker Valve
Regensburg, Germany
2012 LAM Research Corp. SEZ 323
- Manufacturer: Lam Research - Novellus
- Model: SEZ 323
Set size: 300 mm | Power requirements: Other V 75.0 A 50/60 Hz 3 Phase
Regensburg, Germany
2016 LAM Research Corp. WETV18-04
- Manufacturer: Lam Research - Novellus
SEZ 304 Minimum: 150 mm | Maximum: 300 mm | Set size: 300 mm | Number of robots: 1 | Tank material: PVDF | Automatic wafer transfer: YES | Controller type: Microprocessor Controller Type | Other information: the ...
Regensburg, Germany
2000 LAM Research Corp. L4500/7D
- Manufacturer: Lam Research - Novellus
LAM 45xx/7D Tool for isotropic and Oxyd etch processes.
Regensburg, Germany
2001 LAM Research Corp. Alliance 9400 PTX
- Manufacturer: Lam Research - Novellus
Mainframe with 3 Plasmachambers C-Upgrade in 2024 Mainframe and 2 Plasmachambers fully usable 1 Plasmachamber Hardware incomplete
Regensburg, Germany
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