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Used Etching Systems

1999 MRC BMC-600
- Manufacturer: MRC
Dry etching system (Pt)
Yongin-si, South Korea
1989 CANON ANELVA ILD-4003T
- Manufacturer: Anelva
Dry etching system (SiO2)
Yongin-si, South Korea
1994 Applied Materials PE-8330A
- Manufacturer: Amat
Dry etching system (AL)
Yongin-si, South Korea
1988 Applied Materials PE-8330A
- Manufacturer: Amat
Dry etching system (AL)
Yongin-si, South Korea
1994 Applied Materials P-5030
- Manufacturer: Amat
Dry etching system (AL)
Yongin-si, South Korea
1989 TOKYO OHKA OAPM-301B
- Manufacturer: TOKYO OHKA
Dry etching system (SiN)
Yongin-si, South Korea
1983 TOKYO OHKA OAPM-301B
- Manufacturer: TOKYO OHKA
Dry etching system (SiN)
Yongin-si, South Korea
1984 TOKYO OHKA OAPM-301B
- Manufacturer: TOKYO OHKA
Dry etching system (SiN)
Yongin-si, South Korea
1989 TOYOKO KAGAKU
- Manufacturer: TOYOKO KAGAKU
Wet etching system （SiO2）
Yongin-si, South Korea
TEL TE 5480
- Manufacturer: Tokyo Electron - TEL
Plasma Reactive Ion Etch System
Yongin-si, South Korea
1999 Applied Materials P-5040E
- Manufacturer: Amat
Dry etching system (Si trench)
Yongin-si, South Korea
1984 TOKYO OHKA OAPM-301B
- Manufacturer: TOKYO OHKA
Dry etching system (O2 treatment)
Yongin-si, South Korea
1995 Yokogawa Electric Rainbow-4500
- Manufacturer: Yokogawa
Dry etching system (R-4500)
Yongin-si, South Korea
1983 TOKYO OHKA OAPM-301B
- Manufacturer: TOKYO OHKA
Dry etching system (O2/CF4 treatment)
Yongin-si, South Korea
1999 NOVELLUS L3500
- Manufacturer: Lam Research - Novellus
ETCH Wafer size: 8"
Yongin-si, South Korea