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    KLA-Tencor Surfscan SP1 DLS

    • Manufacturer: KLA-Tencor
    • Model: Surfscan SP1

    KLA-Tencor Surfscan SP1 DLS The Surfscan SP1 DLS unpatterned wafer inspection system captures yield-limiting defects down to 50nm at high throughput, to accelerate yield learning rates across all process modules ...

    Bree, Ireland