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KLA-Tencor Surfscan 6400 Particle Inspection System
- Manufacturer: KLA-Tencor
- Model: Surfscan 6400
KLA-TENCOR SURFSCAN 6400 Particle NSPECTION SYSTEMconsisting of:- Model: Surfscan 6400- Particle Inspection System- System can handle up to 200mm capable- Cassette Handling: Single puck handling from single casse...
Decatur, GA 
KLA-Tencor Model AIT XP Darkfield Inspection System
- Manufacturer: KLA-Tencor
- Model: AIT XP
The KLA-Tencor AIT XP+ Patterned Wafer Inspection system is designed to meet the needs of 0.13um and beyond design rule processes. Based on the highly popular AIT series, the AIT XP+ incorporates Mixed Mode Detec...
San Jose, CA
KLA-Tencor Surfscan 6400 Film Surface Analysis System
- Manufacturer: KLA-Tencor
- Model: Surfscan 6400
KLA-Tencor 6400 Surfscan film surface analysis system for detection of contaminating particles. Detects contaminating partciles on all surfaces even rough surfaces. Small particles on dielectrics, polysilicon, ba...
San Jose, CA
KLA-TENCOR SURFSCAN 6220 (SFS 6220)
- Manufacturer: KLA-Tencor
- Model: Surfscan 6220
KLA-Tencor Surfscan 6220 (SFS 6220) Wafer Surface Contamination Analysis System The SFS 6220 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers. System is calibrated, tes...
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