Used analysis instruments

KLA-TENCOR SURFSCAN 6220 (SFS 6220)

• Manufacturer: KLA-Tencor
• Model: Surfscan 6220

KLA-Tencor Surfscan 6220 (SFS 6220) Wafer Surface Contamination Analysis System The SFS 6220 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers. System is calibrated, tes...