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KLA-Tencor Corp. Surfscan SP2.5+
- Manufacturer: KLA-Tencor
- Model: Surfscan SP2
Particle Measurement Metrology Equipment Currently Configured for: 300mm · Defect Inspection · Two Load Ports · SECS/GEM Capability · Integration to Klarity/UDB · Auto DSA · High resolution 3D imaging of ...
United States