
2006 KLA TENCOR CS20
- Manufacturer: KLA-Tencor
- Model: CS20
[ General Description ] [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) [ Application ] - Opaque substrates - EPI Layers - Transparent film coatings (S...
Cheonan-si, South Korea
2006 KLA TENCOR CS20
- Manufacturer: KLA-Tencor
- Model: CS20
[ General Description ] [ Performance ] Defect Sensitivity 0.08 μm diameter PSL sphere equivalent > 95% capture rate(PSL on bare Si) [ Application ] - Opaque substrates - EPI Layers - Transparent film coatings (S...
Cheonan-si, South Korea

