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Used Deposition Equipment (Cvd, Pvd) in Gyeonggi-do, South Korea

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    1982 TEL

    • Manufacturer: Tokyo Electron - TEL

    LP-CVD （SiN）

    Yongin-si, South Korea
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    1991 TEL VCF-610

    • Manufacturer: Tokyo Electron - TEL

    LP-CVD HTO

    Yongin-si, South Korea
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    1985 AMAYA AEC2250

    • Manufacturer: AMAYA

    AP-CVD（VAPOX）

    Yongin-si, South Korea
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    1995 AMAYA AMAX-200

    • Manufacturer: AMAYA

    AP-CVD(AMAX)

    Yongin-si, South Korea
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    TEL UNITY-EP

    • Manufacturer: Tokyo Electron - TEL
    • Model: UNITY-EP

    TiN/Ti-CVD Wafer size: 200mm

    Yongin-si, South Korea
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    OSHITARI LABORATORY OQWAM-2402J

    • Manufacturer: OSHITARI

    Tool Etching Washer for CVD Wafer size: 200mm

    Yongin-si, South Korea
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    1994 ASM Eagle-10

    • Manufacturer: ASM

    P-CVD(E-10)

    Yongin-si, South Korea
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    1996 東京ｴﾚｸﾄﾛﾝ(TEL) MB2-730

    • Manufacturer: 東京エレクトロン

    Metal CVD Diffusion Furnace Wafer size: 8inch

    Yongin-si, South Korea
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    1986 TOYOKO KAGAKU

    • Manufacturer: TOYOKO KAGAKU

    AP-CVD tray washer

    Yongin-si, South Korea
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    TEL MB2 730HT

    • Manufacturer: Tokyo Electron - TEL

    CVD system,3 Chambers set up for WSi Process

    Yongin-si, South Korea
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    1997 国際電気(Kokusai) DJ-833V

    • Manufacturer: Kokusai
    • Model: DJ-833V

    LP-CVD(Furnace) D-Poly, LP-CVD Wafer size: 8inch(減圧仕様)

    Yongin-si, South Korea
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    AMAT PRODUCER Standard

    • Manufacturer: Amat
    • Model: Producer

    PRODUCER-STANDARD / DARC / PECVD 200mm Twin Chamber *3

    Yongin-si, South Korea
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    AMAT CENTURA 5200

    • Manufacturer: Amat
    • Model: Centura

    Centura 5200 ILD / AMAT CENTURA 5200 standard mainframe body Narrow Body Loadlock Chamber / DLH process Chamber * 3 / MS Cool / HP+ Robot wafer handling assembly / System Controller/AC Power Box / RF Generator Rack

    Yongin-si, South Korea
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    WJ WJ999R

    • Manufacturer: WJ

    Hydride and TEOS Process

    Yongin-si, South Korea
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    2006 AMAT Centura

    • Manufacturer: Amat
    • Model: Centura

    2 CH, Polycide(1Poly + 1 Wsix) , AP Wafer size: 300mm

    Yongin-si, South Korea
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