Used Lithography (Photolithography)

Karl Suss ACS200 Classic

• Manufacturer: SÜSS MicroTec
• Model: ACS 200

ACS200 Classic (1 DEV, 1 RC8 spinner, 1 Hot Plate & 1 Set of Hot/Cold) 200mm As-is or refurb

Laurel Spin Coater (200 mm wafer)

• Manufacturer: Laurel

Used, looks complete

DNS / DAINIPPON SK-80BW-AVPF 2c2d (2) Coater / (2) Developer system, 6"

• Manufacturer: Dainippon Screen

DNS / DAINIPPON SK-80BW-AVPF (2) Coater / (2) Developer system, 6" (4) Load ports (4) LH Units (4) Chill plates (10) Hot plates EEW Unit (4) Resist dispense lines (4) IDI 400 Series pumps

TOKYO ELECTRON LIMITED Act12

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

2 available 1x STAND ALONE TRACK, CU 1x TRACK, UNITY, C4 HIGH TPT PROCESS

Karl Suss ACS200 Classic

• Manufacturer: SÜSS MicroTec
• Model: ACS 200

ACS200 Classic(1 DEV, 2 RC8 spinner, 1 Set of Hot/Cold Plates) 200mm As-is or refurb

TEL Act 12

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

TRACK, UNITY, C4 HIGH TPT PROCESS

TEL ACT 12

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

STAND ALONE TRACK, CU

DNS / DAINIPPON SK-80BW-AVPF (2) Coater / (2) Developer system, 6"

• Manufacturer: Dainippon Screen

DNS / DAINIPPON SK-80BW-AVPF (2) Coater / (2) Developer system, 6" (4) Load ports (4) LH Units (4) Chill plates (10) Hot plates EEW Unit (4) Resist dispense lines (4) IDI 400 Series pumps

Heidelberg DWL 200

• Manufacturer: Heidelberg

Heidelberg DWL 200 G-line Laser writer with 0.8 µm spot size Up to 8″ round or square substrates with thickness up to 1 cm Direct write on uneven substrates up to 100 µm variation in flatness 6 bits grayscale wri...

248nm KrF Scanner

• Manufacturer: Canon

Status: System is currently de-installed by the OEM (April 2014). The entire system is stored in climate controlled warehouse. 2 crates are opened to remove parts: && Crate#3 (Rect Cassette Robot) && Crate#8 (las...

Immersion Scanner

• Manufacturer: Nikon

The tool is still running and is in-service in the Fab

Complete photolitographic line FALCON

• Manufacturer: Nikon

Complete photolitographic line FALCON

Tokyo Electron ACT 8 2C2D DUV E beam process

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Application: 200mm wafers for I-line, DUV, E-beam resist processes. Purchased in 2010 but the Track was never used. We have detailed configuration. Currrently installed. CSI Semi can provide de-installation and r...

ASML 200 quipement semi-conducteur semiconductor equipment used

• Manufacturer: ASML

ASML Twinscan XT 1700I

• Manufacturer: ASML

This is located in Japan Some parts are removed Please send your email to : for a price and inspection.