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Used systeme in South Korea

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    1997 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Metal, 1CH Wafer size: 150mm

    Yongin-si, South Korea
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    1998 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Plasma Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    HITACHI M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    AL Dry Etcher Wafer size: 200mm

    Yongin-si, South Korea