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Used Hitachi Plasma Etching (Dry Etching) in South Korea

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    1998 Hitachi M-501A

    • Manufacturer: Hitachi
    • Model: M-501A

    Plasma Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    1999 Hitachi M-511A

    • Manufacturer: Hitachi
    • Model: M-511A

    Poly Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    2012 HITACHI M8170 XT

    • Manufacturer: Hitachi
    • Model: M-8170XT

    Wafer size: 12

    Yongin-si, South Korea
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    Hitachi M-308ATE

    • Manufacturer: Hitachi
    • Model: M-308ATE

    Metal Etch System

    Yongin-si, South Korea
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    HITACHI M-602A

    • Manufacturer: Hitachi
    • Model: M-602A

    AL Dry Etcher Wafer size: 200mm

    Yongin-si, South Korea
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