Used Hitachi Metals Mass Flow Controllers in Tokyo, Japan

Hitachi Metals FCPI 980

• Manufacturer: Hitachi Metals

Manifold set: C4F8*50 SF6*500 N2*200 BCl3*200 ClF3*500 CL2*200 O2*5000 N2*10

Hitachi Metals SFC-480

Gas Ar Flow 1000 SCCM W120 D32 H140 Device name: Mass flow controller