Used Etching Systems

DRYTEK 384T Plasma Metal Etcher

• Manufacturer: Unknown

Plasma Metal Etcher

Ulvac Etcher Model TDE300 (top and bottom etcher - 3D)

• Manufacturer: Ulvac

Original price 2.75M, can etch round stensils, up to 8" wafers

TEL TE-8500S Etcher

• Manufacturer: Tokyo Electron - TEL
• Model: TE-8500S

SiO Etch, Clamp type, 200MM Gas:CHF3/CF4/He/Ar/N2

PSK DAS2000 8

• Manufacturer: PSK

PSK DAS2000 8″ ETCH

PSK DAS2000 8

• Manufacturer: PSK

PSK DAS2000 8″ ETCH

Ulvac NE 7800 Ferroelectric Etcher

• Manufacturer: Ulvac

Ulvac NE 7800 Ferroelectric Etcher ULVAC FERROELECTRIC ETCHER Like New Condition System installed in October of 2007, decommission in Feburary of 2008. Used in a R&D application The Ulvac NE 7800 is a high-temper...

CI Torus 300K

• Manufacturer: Unknown

CI Torus 300K bevel etch 300 mm Vintage 2006

CI Torus 300K

• Manufacturer: Unknown

CI Torus 300K bevel etch 300 mm Vintage 2006

Anelva I-4100 SVII SD

• Manufacturer: Anelva

Anelva I-4100 SVII SD Dry Etch/Ox/8in.

CI Torus 300K

• Manufacturer: Unknown

CI Torus 300K bevel etch 300 mm Vintage 2006

HITACHI KASADO U-511A

• Manufacturer: Hitachi

HITACHI KASADO U-511A POLY ETCH 200 mm Vintage

Hitachi M-308ATW

• Manufacturer: Hitachi
• Model: M-308ATW

Hitachi M-318SX

• Manufacturer: Hitachi

STS ICP Etcher

• Manufacturer: STS

Wafer size: 6.0

TEL TE-8500SATC Etcher

• Manufacturer: Tokyo Electron - TEL

Etchx1/ATCx1, Missing parts available 200MM