Used single component in California, USA

Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) 02

INFORMATION: Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) The Surface Technology Systems Multiplex range of plasma systems combine a single wafer or batch vacuum load lock with STS etch pl...

Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) 01

INFORMATION: Surface Technology Systems (STS) Multiplex Reactive Ion Etcher (RIE) 01 The Surface Technology Systems Multiplex range of plasma systems combine a single wafer or batch vacuum load lock with STS etch...

GaSonics AE-2000LL Isotropic Etcher

• Manufacturer: GaSonics

The GaSonics Aura Loadlock Isotropic Etcher (AE-2000LL) is a microprocessor-controlled down-stream etcher that etches the font, and optionally, the backside of a wafer. The AE-200LL uses a dual-pumping loadlocked...