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TEL Unity II 85 TPA
- Manufacturer: Tokyo Electron - TEL
Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...
Yongin-si, South KoreaSDI/SEMILAB FAaST 230
- Manufacturer: Semilab
- Model: FAAST 230
. Up to 8" . Automatic robotic wafer handling . Single open-cassette wafer loading station . Measurement of dielectric and interface properties on monitor wafer - Dielectric Capacitance (CD) and Thickness (EOT) -...
Cheonan-si, South KoreaNOVELLUS EFEM
- Manufacturer: Lam Research - Novellus
Novellus INVOA NEXT 300mm CU B/S, EFEM - LOAD PORT 3 FOUP - primary User Interface Location : Right with KeyBoard and mouse, and monitor. - Primary User Interface Configuration : Clean Room wall Interface. - Wafe...
Gyeonggi-do, South KoreaAPPLIED MATERIALS AMC 7700
- Manufacturer: Amat
*. Operational at the time of de-installation,To be refurbished *. Wafer Size - 100mm(4") ~ 150mm(6") *. Reactor system configuration: - Staubli Robot - Lift & Roation Assembly - Process chamber Assembly - Lower...
Cheonan-si, South Korea2002 LRC 9600
- Manufacturer: LRC
TM A6 SERIAL : 8987 VINTAGE : 00/01/11 VCE LIP SEAL TYPE ROBOT MAGNATRAN 7 003-1600--27 PM-4 M/W SERIAL: STRIP - 204 PM-1 M/W SERIAL: STRIP - 203 PM-2 9600 DFM SERIAL: 96-6...
$700,000 USDSouth Korea