Used robot interface in Chungcheongnam-do, South Korea

SDI/SEMILAB FAaST 230

• Manufacturer: Semilab
• Model: FAAST 230

. Up to 8" . Automatic robotic wafer handling . Single open-cassette wafer loading station . Measurement of dielectric and interface properties on monitor wafer - Dielectric Capacitance (CD) and Thickness (EOT) -...