Used Lithography (Photolithography)

1998 TEL CLEAN TRACK ACT 8 SINGLE BLOCK

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Single Block (Resist Coater/Developer) Resist Processing Equipment Date of Manufacture: 1998-12-31 Currently Configured for: 200mm

1997 TEL CLEAN TRACK ACT 8 MULTI BLOCK

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Multi Block (Resist Coater/Developer) Resist Processing Equipment Date of Manufacture: 1997-12-31 Currently Configured for: 200mm

2006 TEL Clean Track ACT-8 Dual Block Wafer Coater – Developer

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Condition Used/See Description • Dual Block, 4 Load Port/1 Side Port • 4 Coaters • 3 Developers • 1 TCT • 14 PHP Hot Plates • Currently In-Use for Production • Vintage 2006

TEL Act 8 Part TEL Clean Track

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part TEL Clean Track for Tel Act 8 Part Name Low/High Temperature Hot Plate 3-12 Height .00 Mtrs Width .00 Mtrs Depth .00 Mtrs Physical Volume .00 M3 Weight 15.00 Kgs

2000 TEL Act 8 Coater / Developer

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

- 2 Coater - 2 Developer 2000 Vintage 4"

2000 TEL Tel act 8 coater/Developer

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

2 Coater 2 Developer Currently 4 Inch set up

Tokyo Electron TEL Tokyo Electron 200mm IFB Interface Block Robotics Arm ACT12 No End Effector

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

TEL ACT12-300 Dual Block Track

• used

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

Recently powered off and still in the clean room and waiting for fixture for deinstall and rigging and crating. Tool type: dual process block track Wafer size: 300mm Direction: right hand side 4 blocks interf...

Solitec FlexiFab Coater / Developer

• used

• Manufacturer: Solitec

- Model Flexifab - Currently set up for 6" Wafers - Automated Wafer Handling - Coater Module - Developer Module - Hotplate Module - Cybor Control Module & Power Supply - More Details Can be Found Here: htt...

DNS SC-W80A-W/AVF SOG Coater

• used

• Manufacturer: Dainippon Screen

SOG Spin Coat L Configuration - Load on the Left, Cure Furnace on the Right 25 Slot Cassette Oven type: (4) HP (2) 80C (2) 160C (2) CP 23C (2) HH 250C Refurbished by OEM in 2015, installed by OEM, only u...

Air Control Inc. Custom Laminar Flow Fume Hood

• used

• Manufacturer: AIR CONTROL

Air Control Inc. Custom Laminar Flow Fume Hood

Brewer Science / CEE 200 Spin Coater

• used

• Manufacturer: Brewer Science

Brewer Science / CEE 200 Spin Coater consisting of:- Up to 200mm Capable - 110-125V, 1 Phase, 50/60Hz, 15amp- SN: 2073151 - Chuck