Used semirremolques

Hitachi Chamber Feed-through M-712E Shallow Trench Etcher System Untested As-Is

• used

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E Shallow Trench Etcher System. The unit is missing some components and screws (see photos).” Hitachi Chamber Feed-through M-712E Shallow Trench Etcher System Untested As-Is Sold As-I...

Hitachi Wafer Alignment Unit Vacuum Chuck M-712E Shallow Trench Etcher Used

• used

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E Shallow Trench Etcher System.” Hitachi Wafer Alignment Unit Vacuum Chuck M-712E Shallow Trench Etcher Used Inventory # A-8439 This Hitachi Alignment Unit is used working surplus. Th...

Hitachi ILB-02 Timer Board PCB Card M-712E Shallow Trench Etcher Working

• used

• Manufacturer: Hitachi

Hitachi ILB-02 Timer Board PCB Card M-712E Shallow Trench Etcher Working Inventory # CONH-21, K-2789, A-5407 Removed from a Hitachi M-712E Shallow Trench Etcher System This Hitachi ILB-02 Timer Board PCB Card M-7...

Hitachi Wafer Alignment Unit M-712E 200mm Shallow Trench Etcher Working

• used

• Manufacturer: Hitachi

“Removed from a Hitachi M-712E 200mm Shallow Trench Etcher System. The panels have some minor scuffs (see photos).” Hitachi Wafer Alignment Unit M-712E 200mm Shallow Trench Etcher Working Spare Removed from a Hit...

2005 STS ICP PRO HRM Etcher

• used

• Manufacturer: STS

150mm Bosch process STS Loadlock Chamber Loader with Robot for cassette to cassette operation (2 load stations) ESC Wafer Clamping with Backside Cooling Ebara Turbo Pump (2) Chillers The gases are: Argon M...

Lam Research 490 Polyimide plasma etcher

• used

• Manufacturer: Lam Research - Novellus

Lam Research 490 Polyimide plasma etcher Fully Rebuilt by Aspect systems. Â 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

STS AOE Dielectric ICP Etcher

• used

• Manufacturer: STS

STS AOE Dielectric ICP Etcher - 400 V - 50 Hz

STS Multiplex ICP Etcher

• used

• Manufacturer: STS

Metal Cluster

2000 LAM Alliance 6 9400 PTX Etcher

• used

• Manufacturer: Lam Research - Novellus

- Lam A6 - 208 VAC - 50/60 Hz - Full Load Current: 43 Amps - Capacity of Main Breaker: 10 kA - Upgraded to Windows 7 - Using OES end point - All 3 Poly Etch Chambers - No Chiller or Pumps included 2000 V...

2001 LAM Rainbow 4420 Poly Etcher

• used

• Manufacturer: Lam Research - Novellus

2018 STS / SPTS Versalis fxP Etcher

• used

• Manufacturer: SPTS

- It is configured for autoloading 200mm wafers - It has two process chambers: - CVE – XeF2 etch chamber (isotropic etching of Si) - CVD – oxide, nitride, and silicon - It does not have the Rapier chamber to run ...

1998 STS MULTIPLEX ICP Etcher

• used

• Manufacturer: STS

Vintage: 1998 Wafer size: 6", 8" Condition: as is

Tegal 801 Etchers

• used

• Manufacturer: Tegal

Tegal 801 Etchers (801) Tegal 801 Etchers*Inline Plasma Etcher*Fully automatic*Microprocessor-based*Plasma chemistry etcher designed especially for the etching of thin films deposited...

Tegal 803 Etchers

• used

• Manufacturer: Tegal

Tegal 803 Etchers (803) Tegal 803 Etchers*Inline Automatic Plasma Etcher*Fully automatic*Microprocessor-based plasma chemistry etcher*Designed especially for the etching of silicon di...