Semiconductors » Etching Systems

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563

Used front end

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    TEL TE-8500S

    • Manufacturer: Tokyo Electron - TEL
    • Model: TE-8500S

    Oxide_Etch

    Yongin-si, South Korea
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    TEL Unity ME 85555SSSS

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system * 3 Process chambers

    Yongin-si, South Korea
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    1996 Mattson Aspen II

    • Manufacturer: Mattson

    Asher, 1CH(Non-ICP) Wafer size: 200mm

    Yongin-si, South Korea
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    AMAT IPS

    • Manufacturer: Amat

    Generator Rack / Chamber

    Yongin-si, South Korea
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    1998 Shibaura CDE-80HN

    • Manufacturer: Shibaura

    Poly, 2CH Wafer size: 200mm

    Yongin-si, South Korea
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    TEL UNITY IIe655DD

    • Manufacturer: Tokyo Electron - TEL

    Oxide, DRM(2CH) Wafer size: 150mm

    Yongin-si, South Korea
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    1999 TEL UNITY IIe84SI

    • Manufacturer: Tokyo Electron - TEL

    Poly Etch, 1 IEM CH, Ebara pumps (3) Wafer size: 200mm

    Yongin-si, South Korea
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    TEL UNITY Me SCCM

    • Manufacturer: Tokyo Electron - TEL

    Oxide,SCCM(3CH) Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 4528

    • Manufacturer: Lam Research - Novellus

    PASSIVATION ETCHER Wafer size: 200mm

    Yongin-si, South Korea
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    LAM 496B

    • Manufacturer: Lam Research - Novellus
    • Model: 496B

    Poly Etcher

    Yongin-si, South Korea
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    1999 Hitachi M-511A

    • Manufacturer: Hitachi
    • Model: M-511A

    Poly Etcher Wafer size: 200mm

    Yongin-si, South Korea
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    TEL TE 5480

    • Manufacturer: Tokyo Electron - TEL

    Plasma Reactive Ion Etch System

    Yongin-si, South Korea
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    1997 LAM EXCLEAN

    • Manufacturer: Lam Research - Novellus

    Yongin-si, South Korea
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    1995 AMAT P-5090E

    • Manufacturer: Amat

    Yongin-si, South Korea
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    1997 Shibaura CDE-80AN

    • Manufacturer: Shibaura

    Yongin-si, South Korea
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