Used Etching Systems in Meath, Ireland

TEL TE8500 Plasma Etcher

• used

• Manufacturer: Tokyo Electron - TEL
• Model: TE8500

150MM

TOK TSE306W Plasma Etcher

• used

• Manufacturer: TOK

150MM

Axcelis Technologies Inc. Fusion ES3

• used

• Manufacturer: Axcelis

Axcelis Technologies Inc. Fusion ES3 Stripper/Asher

LAM 490 Etcher

• used

• Manufacturer: Lam Research - Novellus

Fully Rebuilt by Aspect systems. 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

Etcher Inner Gate Valve Drive

• used

• Manufacturer: Lam Research - Novellus

TRION Minilock single wafer RIE Etcher

• used

• Manufacturer: Trion
• Model: MINILOCK

Single Wafer RIE Etcher with Loadlock, 200mm Wafers