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Used robotics and automation in Gyeonggi-do, South Korea

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    TEL TELUnityIIe 85 DD

    • Manufacturer: Tokyo Electron - TEL

    Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) ENI RF Generator / Two(2) ENI Special Automation Matching Network / One(1) N...

    Yongin-si, South Korea
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    TEL Unity II 85 TPA

    • Manufacturer: Tokyo Electron - TEL

    Polymide Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) Daihen RF Generator / Two(2) Daihen Automation Matching Network / Two(2) SM...

    Yongin-si, South Korea