Used Lithography (Photolithography)

Tokyo Electron ACT 8 2C2D DUV E beam process

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Application: 200mm wafers for I-line, DUV, E-beam resist processes. Purchased in 2010 but the Track was never used. We have detailed configuration. Currrently installed. CSI Semi can provide de-installation and r...

ASML 200 quipement semi-conducteur semiconductor equipment used

• Manufacturer: ASML

DNS SK-80BW-AVPQE

• Manufacturer: Dainippon Screen
• Model: SK-80BW-AVPQE

DNS SK-80BW-AVPQE

DNS SK-80BW-AP

• Manufacturer: Dainippon Screen
• Model: SK-80

DNS SK-80BW-AP

ASML Twinscan XT 1700I

• Manufacturer: ASML

This is located in Japan Some parts are removed Please send your email to : for a price and inspection.

EVG Hercules Lithography Track System (200mm)

• Manufacturer: EVG
• Model: Hercules

EVG Hercules Lithography system 200mm - available in working wafer fab cleanroom - July 2024

SEMIX / TAZMO

• Manufacturer: SEMIX

for Wafer Size: 4"- 6" Coater systems, 4"-6" (3) Zone hotplate Single / double cassette Fluoroware type with pitch of 3/16" for (25) Wafers SOG Nozzles: 0.85mm, 1/16" tubing Nozzle capping mechanism Nozzle clean...

MUSCAT T200 Developer 8/6"

• Manufacturer: MUSCAT

Available in a working cleanroom waferfab July 2024 - contact CSI Semi

MUSCAT SPL-347 Developer 8/6"

• Manufacturer: MUSCAT

Available from a working cleanroom waferfab in July 2024 - contact CSI Semi

FSI Polaris 2200 ( 200mm )

• Manufacturer: FSI

FSI Polaris 2200 - available July 2024 ( 200mm )

Nikon EX12B Stepper 200mm

• Manufacturer: Nikon

Nikon EX12B Stepper - available July 2024 ( 200mm ) contact : csisemi

TEL Act 8 Part Level 1 / Level 2 Safety Interlock Defeat Switches

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Level 1 / Level 2 Safety Interlock Defeat Switches for Tel Act 8 Height .05 Mtrs Width .05 Mtrs Depth .05 Mtrs Physical Volume .00 M3 Weight .14 Kgs Connectors For Panel I/O Board Missing. Qty. 2

TEL Act 8 Part PCH Air Purge Flow Meter/Regulator

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part PCH Air Purge Flow Meter/Regulator for Tel Act 8 Height .13 Mtrs Width .12 Mtrs Depth .13 Mtrs Physical Volume .00 M3 Weight .50 Kgs

TEL Act 8 Part Servo Pack

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Part Servo Pack for Tel Act 8 Part Name Dev 3-3 Spinner Motor Driver Height .18 Mtrs Width .12 Mtrs Depth .23 Mtrs Physical Volume .00 M3 Weight 2.25 Kgs AC Input: AC Output: Volts: 200-230 Volts: 0...

TEL Act 8 Part Servo Pack

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-8

Servo Pack for Tel Act 8 There are 4 units in stock. Manufacturer: Yaskawa Model: CACR-02-TE1K TEL OEM Part Numbers: - O/N 097515-1-84 - O/N 097515-1-82 - O/N 097515-1-91 - O/N 097515-1-36 These parts are M...