Used Lithography (Photolithography)

Suss Microtec ACS 800 Coater Developer

• Manufacturer: SÜSS MicroTec
• Model: ACS 800

For full spec and Layout click on below Link TRACK_07 Coat chambers 2 ea Develop chambers 1ea Dehydration plate 1ea Hotplates 4ea

Cymer ELS 4000D Laser System

• Manufacturer: CYMER

Cymer ELS 4000 Laser System 248nm KrF Excimer DUV laser Max average power 50 W Max pulse energy 0.5 J Duration 10-50 ns

Polyimide Apply Hood

• Manufacturer: POLYIMIDE APPLY HOOD

Polyimide Apply Hood

GCA ULTRATECH XLS 7800 248nm DUV Stepper

• Manufacturer: Ultratech

GCA ULTRATECH XLS 7800 248nm DUV Stepper GCA Ultratech XLS 7800 full field (22 squared mm), NA=0.51, 4X reduction step and repeat exposure tool using a 248nm laser source.

Envirco Corp, Resist Apply Laminar Flow Hood

• Manufacturer: ENVIRCO CORP

Envirco Corp, Resist Apply Laminar Flow Hood

Karl Suss MA56 Mask Aligner

• Manufacturer: SÜSS MicroTec
• Model: MA56

Karl Suss MA56 Mask Aligner The Karl Suss MA 56 is a mask alignment and exposure system which offers unsurpassed, highly economical mass production capabilities for cassette to cassette handling of wafers up ...

SVGL MICRASCAN MPT 193nm Scanner

• Manufacturer: SVGL

SVGL MICRASCAN MPT 193nm Scanner SVG DUV (193nm) stepper configured for processing 200mm wafers and linked to TEL Act 8. Tool uses catadioptric lens design incorporating both reflective and refractive optica...

Nikon Fly's Eye Field Lens NSR-S204B Step-and-Repeat Scanning System Used

• Manufacturer: Nikon

Part No: Fly's Eye Field Lens Removed from a Nikon NSR-S204B Step-and-Repeat Scanning System Used, good condition Sold as-is, Ex-Works USA

Convac Developer

• Manufacturer: Convac

TEL act 12 more racks with Hot plates

• Manufacturer: Tokyo Electron - TEL
• Model: ACT-12

PRI 7700 Reticle stocker

• Manufacturer: PRI

One complete Reticle stocker CE, Fully operational The PRI-7700 provides Class 1 clean storage and inventory management for reticles stored in boxes or SMIF pods The high-density, modular design satisfies the sto...

PRI 7000 series Reticle stocker parts

• Manufacturer: PRI

BM23475 5 SAMS IO BD bM 17477 5 Power supply BM 29561 5 EMO BOX BM27887 5 KIT COMPUTER 486-66,VGA,digi BM23951/05/R 5 Y CHAIN BM 24480 5 interconnect card BM 18251 5 interconnect card BM 1213L08R 5 led displays B...

Lambda Physik COMPex 150 Laser System

• Manufacturer: Lambda

Lambda Physik COMPex 150 Laser System This versatile oscillator/amplifier laser system allows either low divergent, spectrally narrowed or high power density operations. System specifications: - Power: ≤ 30 W...

WET BENCH SPM 3

• Manufacturer: SPM

WET ETCH Al/Cu - Au - Ta

LASERTEC RETICLE HANDLER DUAL POD DP200

• Manufacturer: Lasertec

Still installed in Lab