Used robot controllers

2004 AMAT Centura RTP

• Manufacturer: Amat
• Model: Centura

2 same config available 2 Xe chambers and 2 cool down chambers. WAFER SIZE: 8 INCH PROGRESS TYPE: CHAMBER POSITION: CH A - RTP CH B - RTP CH C - EMPTY CH D - EMPTY CH E - COOLDOWN CH F - COOLDOWN Buffe...

XP ROBOT CONTROLLER

• Manufacturer: Amat
• Model: Endura

XP ROBOT CONTROLLER

• Manufacturer: Amat
• Model: Endura

2022 Novellus/ LAM Concept Two Speed NExT CVD 8"

• Manufacturer: Lam Research - Novellus

- Wafer Shape: Notch - SMIF Interface: Yes - Cassette Loader: LPI 2200 - Loadlock Indexer Robot: Indexer II - PEC slot: MPS with one cool station - Main power distributer: PDP - System Main Power: 3￠5Wires ...

XP ROBOT CONTROLLER

• Manufacturer: Amat
• Model: Endura

ASML Twinscan XT 1250 D Scanner 12"

• Manufacturer: ASML

ASML Twinscan XT 1250 D Scanner, 12" - with Cymer XLA165 -Track Pre-warning signal (APR)s: APR enabled - Avoid Track INPUT/OUTPUT conflicts, Raise AS after APRs: Avoid Track - INPUT/OUTPUT conflicts enabled ...

AMAT Centura EPI

• Manufacturer: Amat
• Model: Centura

Centura HTF EPI 3ch ATM, 200mm, s/n H046 system for sale As Is Complete and “Power On”. - 480V/50Hz/600A ‐ Centura HTF Toxic Epi mainframe ‐ Centura HTF Controller - Flat panel monitor - Widebody loadlocks ...

2003 AMAT 200mm Centura II

• Manufacturer: Amat
• Model: Centura

Centura MF II Software: Vita Controller Indexer: Narrow Body / Tilt out mit Dummy Wafer Storage Robot: HP+ Chamber: A -> DPS+ B -> DPS+ C -> IPS D -> ASP+ E -> Single Cooldown F -> Orienter Power Requi...

Novellus C2 Altus spare parts, Sabre spare parts

• Manufacturer: Lam Research - Novellus
• Model: Altus

Contact us with your parts request NOVELLUS OEM TOOL TYPE # of Units TARA PART # PART NAME Part Number NOVELLUS C2 ALTUS 4 100303 ASSY,VENT PURGE 02-834770-00 NOVELLUS C2 ALTUS 19 100304 IO CONTROLLER 27-1015...

Novellus Systems Inc VECTOR Express PECVD Chemical Vapor Deposition

• Manufacturer: Lam Research - Novellus
• Model: Vector

Novellus Systems Inc. VECTOR Express PECVD (Chemical Vapor Deposition) Configuration. Supplier Novellus Model Vector Express Description Vector Express – 1 Chamber AHM Facility & Interface WTS(backbone) Facilitie...

HDP CVD Chemical Vapor Deposition

• Manufacturer: Unknown

• Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 3.7_31 • Factory Interface (FI) o (2) 300mm TDK TAS300 (Type F1) FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slo...

HDP CVD Chemical Vapor Deposition

• Manufacturer: Unknown

• Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 3.7_26 • Factory Interface (FI) o E-Servers installed o (2) 300mm TDK TAS300 (Type F1) FOUP Load-ports o Enhanced 25-slo...

HDP CVD Chemical Vapor Deposition

• Manufacturer: Unknown

• Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 4.0_23 • Factory Interface (FI) o (2) 300mm FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slot Wafer Pass-Thru / S...

HDP CVD Chemical Vapor Deposition

• Manufacturer: Unknown

• Currently Configured for 300mm wafer sizes • MFG Date: 2005 • CE Marked • System SW Rev.: 3.7_31 • Factory Interface (FI) o (2) 300mm FOUP Load-ports o Enhanced 25-slot FOUP support o 8-Slot Wafer Pass-Thru / S...

HDP CVD Chemical Vapor Deposition

• Manufacturer: Unknown

•300mm •Dual FOUP •MAG 7 robot •2005 vintage •Processes oNanofill USG STI/PMD/ILD oNanofill II USG STI oPSG •Single Speed NExT •Bottom facilities •Remote cables – 75ft •User interface – Right •Remote clean oMKS A...