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2004 Tel ACT8-D
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-8
ACT DB System, AC Power Box, T/C Unit 1+2, T/H Controller ESA 1+2, Chemical Cabinet 1, 2, 3
Regensburg, Germany
2013 Tel ACT8-D
- Manufacturer: Tokyo Electron - TEL
- Model: ACT-8
AC Power Box, T/C Unit, T/H Controller 1+2, Chemical Cabinet Last Time in production: 5/5/25 Contact: Agthen Robert (FE DRS P M2 MNT LIT)
Regensburg, Germany