Building Filters
AMAT Centura 5200
- Manufacturer: Amat
- Model: Centura
WxZ process Narrow Body Loadlock / WxZ process Chamber 4 / MS Cooldown / HP Robot / System Controller/AC Power Box / RF Generator Rack (2MT501)
Yongin-si, South Korea- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
- Yongin-si, South Korea
TEL UNITY-EP
- Manufacturer: Tokyo Electron - TEL
- Model: UNITY-EP
Process Module 3 TiN/Ti-CVD Wafer size: 8"
Yongin-si, South Korea- Yongin-si, South Korea
AG Associates 2106
- Manufacturer: AG Associates
- Model: 2106
Rapid Thermal Processing System, for 100mm-150mm Wafers
Yongin-si, South KoreaAMAT (Applied Materials) P5000 PECVD 3 Chamber SiN
- Manufacturer: Amat
- Model: P5000
Plasma Enhanced CVD system (3 chamber, SiN process)
Yongin-si, South Korea