Building Filters
APPLIED MATERIALS AMC 7700
- Manufacturer: Amat
*. Operational at the time of de-installation,To be refurbished *. Wafer Size - 100mm(4") ~ 150mm(6") *. Reactor system configuration: - Staubli Robot - Lift & Roation Assembly - Process chamber Assembly - Lower...
Cheonan-si, South Korea
1998 PROMETRIX RS35
- Manufacturer: PROMETRIX
*. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 site...
Cheonan-si, South Korea
Cheonan-si, South Korea
Cheonan-si, South Korea
Cheonan-si, South Korea
1996 NANOMETRICS 2100
- Manufacturer: Nanometrics
- silicon dioxide on silicon 400~ 30,000 A. - photo resist on silicon 500~ 40,000 A. - other thin films. *. Hardware configuration: - Optical microscope & objectives 5x,10x,40x. - Spectrophotometer Head. - Microc...
Cheonan-si, South Korea
NANOMETRICS 210
- Manufacturer: Nanometrics
- Model: 210
- silicon dioxide on silicon 400~ 30,000 A. - photo resist on silicon 500~ 40,000 A. - other thin films. *. Hardware configuration: - Optical microscope & objectives 5x,10x,40x. - Spectrophotometer Head. - Microc...
Cheonan-si, South Korea
1992 PROMETRIX RS 35
- Manufacturer: PROMETRIX
*. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 site...
Cheonan-si, South Korea
1998 SOLID STATE MEASRUEMENT INC. SSM150
- Manufacturer: SOLID STATE MEASRUEMENT INC.
*. Measurement perfomance: - Resistivity and Dopant concentration - Resistance measurement & Carrier concentration profile analysis in all structures of silicon *. Measurement configuration: - Carrier concentrati...
Cheonan-si, South Korea
SDI/SEMILAB FAaST 200 SL
- Manufacturer: Semilab
- Model: FAAST 200 SL
non-contact electrical C-V & I-V measurement system capable of measuring on product wafers. Measurements can be made in scribe line test sites or in the active cell area. Cell measurements allow for the first ti...
Cheonan-si, South Korea
1996 HITACHI S-5000
- Manufacturer: Hitachi
- Model: S-5000
*. Image Resolution: - 30KV 0.6nm - 1 KV 2.5nm with a test specimen *.Magnification 20X ~ 300,000X *. Stage Movement X ±3.5 mm,Y ±2 mm,Z ±0.3 mm,Tilt ±15 tilt *. Sample holder Column insert type *. Sample excha...
Cheonan-si, South Korea