Used controllers in Tokyo, Japan

UB 5850E

O2,20sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

Ar, 50sccm Device name: Mass flow controller

HORIBA STEC Stec SEC-7330

Sih4 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7350

H2,30SLM Device name: Mass flow controller (MFC)

SAM SFC-580MO4VD

O2 20sccm Device name: Mass flow controller

UB 5850E

CF4,10sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

N2, 50sccm Device name: Mass flow controller

SAM SFC-580MO4VD

Ar 100sccm Device name: Mass flow controller

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

H2 500sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

HCI 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

2% Sih4 / H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2% Sih4 / H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7350

H2,30SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-4600

H2,60SLM VCR Device name: Mass flow controller (MFC)