Used controller in Tokyo, Japan

Tylan FC-770AC

Gas Ar flow 20 SCCM W120 D32 H125 Device name: Mass flow controller

Tylan FC-761

Gas N2 Flow 10SLM W150 D40 H180 Device name: Mass flow controller

Tylan FC-260

Gas HCl flow rate 1 SLMW130 D25 H110 Device name: Mass flow controller

Tylan FC-260

Gas SiH4 flow rate 500 SCCM W130 D25 H110 Device name: Mass flow controller

Horiba Tech SEF-21A

Gas N2 O2 Air Flow 500SCCM W100 D30 H65 Device name: Mass flow controller

Hitachi Metals SFC-480

Gas Ar Flow 1000 SCCM W120 D32 H140 Device name: Mass flow controller

UB 5850E

O2,20sccm VCR Device name: Mass flow controller

SAM SFC-280E4S

Ar, 50sccm Device name: Mass flow controller

Horiba Stec SEC-400MK3-UL

Flow: 1 SLM Gas: H2 Device name: Mass flow controller (MFC)

2000 Edwards SCU-301H

• Manufacturer: Edwards
• Model: SCU

Device name: Turbo molecular pump controller

Horiba Stec PV-1502MC

Device name: Mass flow controller (MFC)

Horiba Stec PV-1501MC

Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)

Horiba Tech Stec SEC-410-146

Gas: 4% PH3/Ar Flow: 250 CCM Device name: Mass flow controller (MFC)