Used automated in South Korea

GP/GA14/15W

The grindstone traverse structure requires a stronger foundation structure than the table traverse structure. OKUMA's high rigidity technology satisfies these conditions, enabling the grindstone traverse structur...

KLA Tencor UV-1050

• Manufacturer: KLA-Tencor
• Model: UV-1050

Fully automated measurement module, automated wafer handling / Windows NT user interface / 2 cassette loader for 1 specific wafer size

AMAT OPAL 7830i

• Manufacturer: Amat

CD SEM, Automated

2006 VEECO DIMENSION X3D

• Manufacturer: Veeco - Sloan
• Model: Dimension

AUTOMIC FORCE MICROSCOPE

Nanotronics nTelligence System

• Manufacturer: Nanotronics

Fully Automated Optical Inspection System

KLA Tencor KT2401

• Manufacturer: KLA-Tencor

ILM2401 Automated Macro Defect Inspection System

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical LP-CVD System NIT Furnace / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical AP System ALPHA-8S ( N2 L/L ) / CAP OX ( TEOS) / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical AP System ALPHA-8S Alloy Furnace / Main System / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

TEL Alpha 8S

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8S

Vertical AP-System Trans-LC , non N2 load lock / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

TEL Alpha 8SE

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8SE

Vertical LP-CVD System ALPHA-8SE N2 L/L Poly Furnace / TS4000 Controller / Photohelic Gauge / Boat Elevator / Wafer Load Automation / 16 Cassette Stocker

TEL Alpha 8SE

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8SE

Vertical AP System/Select Oxidation Wave Controller / Photohelic Gauge / Trans-LC / Boat Elevator / WVG system / Wafer Load Automation / 21 Cassette Stocker / Temperature Controller (M560)

TEL Alpha 8SE

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8SE

Vertical AP System ALPHA-8SE / Select Oxidation / Wave Controller / Photohelic Gauge / Trans-LC / Boat Elevator / WVG system / Wafer Load Automation / 21 Cassette Stocker / Temperature Controller (M560)

TEL Alpha 8SE

• Manufacturer: Tokyo Electron - TEL
• Model: ALPHA 8SE

Vertical LP-CVD System ALPHA-8SE / AL2O3 / Hafnium Process Furnace -N2 L/L / Wave Controller / Photohelic Gauge / Trans-LC / Boat Elevator / WVG system / Wafer Load Automation / 21 Cassette Stocker / Temperature ...

TEL TELUnityIIe 85 DD

• Manufacturer: Tokyo Electron - TEL

Ceramic Electrostatic Chuck hardware for wafer with Dual He cooling system / Cassette load lock protection for Process chamber / Two(2) ENI RF Generator / Two(2) ENI Special Automation Matching Network / One(1) N...