Year: 2008 Specs:.
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Est. $101/mo
Device name: Helium Leak Detectors
Device name: Vacuum gauge
Device name: Thermocouple (TC Gauge)
Device name: Data logger
Device name: Temperature controller
Gas:N2 Flow rate:200CCM Device name: Mass flow controller (MFC)
Device name: Mass flow controller (MFC)
Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)
Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)
Gas: 20% SiH4/He Flow: 2 L/min Device name: Mass flow controller (MFC)
Gas: CCI4 Flow: 50 SCCM Device name: Mass flow controller (MFC)
Gas: BCI3 Flow rate: 200 CCM Device name: Mass flow controller (MFC)
Gas: CHF3 Flow rate: 200 CCM Device name: Mass flow controller (MFC)
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan