Used automated in Cavan, Ireland

Koganei Rodless Cylinder ORCA20X500

• Manufacturer: Koganei

EQUIPE PRE-3190

• Manufacturer: EQUIPE

Wafer Prealigner, for up to 200mm Wafers

TEL TUBE 1,UEL GAS LINE(OX)2..

• Manufacturer: Tokyo Electron - TEL

TUBE 1,UEL GAS LINE(OX)2..

PEARL ZDK-916_2 BOT

• Manufacturer: PEARL

MATCHER

TEL RING, SPACER INSULATOR N

• Manufacturer: Tokyo Electron - TEL

RING, SPACER INSULATOR N

Mattson Filter, PFA 1/2inVCR MMGLFPF6101VM6/8

• Manufacturer: Mattson

Filter, PFA 1/2inVCR MMGLFPF6101VM6/8

TEL PIN LOCATE, EXHAUST

• Manufacturer: Tokyo Electron - TEL

PIN LOCATE, EXHAUST

Toray TMT-E47/1

• Manufacturer: Toray

Numbering exposure

eFlow eFlow1000CK

• Manufacturer: eFlow

Co2 Bubbler

FLOW CONTROLLER

• Manufacturer: Tokyo Electron - TEL

FLOW CONTROLLER

SHOWER HEAD

• Manufacturer: Tokyo Electron - TEL

SHOWER HEAD

PCB

• Manufacturer: Tokyo Electron - TEL

PCB

ROBOT WAFER ARM

• Manufacturer: Tokyo Electron - TEL

ROBOT WAFER ARM

ROBOT WAFER ARM

• Manufacturer: Tokyo Electron - TEL

ROBOT WAFER ARM

WAFER DISPENSER

• Manufacturer: Tokyo Electron - TEL

WAFER DISPENSER