Used automated in Chuo City, Tokyo, Japan

ULVAC Ulvac Heliot 701

• Manufacturer: Heliot

Year: 2008 Specs:.

NACHI Robot

Device name: robot

Inficon Inficon P3000XL

• Manufacturer: Inficon

Year: 2012 Spec: Sniffer type

SEC-4500MC-SUC

Year Marking: Specs:.

HORIBA STEC Stec SEC-7330

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

H2 500sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

HCI 1SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2% Sih4 / H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

2% Sih4 / H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7350

H2,30SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-4600

H2,60SLM VCR Device name: Mass flow controller (MFC)

SAM SFC-580MO4VD

O2 20sccm Device name: Mass flow controller

Komatsu Hydraulic Jack: 2piece (1set) OSA; Komatsu Hydraulic Cylinder Jack

Komatsu Hydraulic Jack: OSA; Komatsu Hydraulic Cylinder Jack

Komatsu Hydraulic Jack: OSA; Komatsu Hydraulic Cylinder Jack