Used Mass Flow Controllers in Tokyo, Japan

Tylan FM-861

Gas: O2 Flow rate: 20 SLM Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-400MK3

Gas: O2 Flow: 5 L.M Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas: O2　Flow rate: 5 SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:20%SiH4/Ar Flow rate:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEF-1R

Gas N2 Flow 20SLMW110 D30 H65 Device name: Mass flow controller

HORIBA STEC SEC-4400MO-UC

• Manufacturer: Horiba

Gas O2 flow 500CCMW125 D31 H127 Device name: Mass flow controller

Tylan FC-781C

Gas N2 flow 50SLMW150 D40 H155 Device name: Mass flow controller

Tylan FC-781C

Gas O2 flow 20SLMW150 D40 H155 Device name: Mass flow controller

Tylan FC-780

Gas HCl flow 500 SCCM W125 D34 H170 Device name: Mass flow controller

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-4400MC-UC

Gas: SiH2Cl2 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Horiba Tech SEC-500MK3

Gas O2 flow rate 10LMW150 D60 H180 Device name: Mass flow controller

Tylan FC-860

Gas NH3 flow 500 SCCM W155 D33 H175 Device name: Mass flow controller

Tylan FC-761

Gas N2 Flow 10SLM W150 D40 H180 Device name: Mass flow controller