Used Mass Flow Controllers in Tokyo, Japan

Tylan FC-260

Gas: SIH2CL2 Flow: 100 SCCM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:50%SiH4/N2 Flow rate:1SLM Device name: Mass flow controller (MFC)

Horiba Stec Stec SEC-410

Gas:1%B2H6/Ar Flow:1LM Device name: Mass flow controller (MFC)

Horiba Stec SEC-7330M

Gas: B2H6 Flow rate: 200 SCCM Device name: Mass flow controller (MFC)

Brooks 5877

• Manufacturer: Brooks

Gas CF4 flow rate 100 SCCM W210 D40 H130 Device name: Mass flow controller (MFC)

Horiba Stec PV-1502NC

Device name: Mass flow controller (MFC)

堀場エステック Stec SEC-E440

O2、500SCCM Device name: Mass flow controller (MFC)

Horiba Stec SEC-3400SM-SP

H2 50CCMSMT-3000 accessory Device name: Mass flow controller (MFC)

Lintec MC-3102L-NC-4JR2AAA00

• Model: MC-3102

N2, 100SCCM Device name: Mass flow controller (MFC)

Rintech CV-2100NO LEP

H2 2 SLM Device name: Mass flow controller (MFC)

Rintek MC2100MOWR

H2 200 SCCM Device name: Mass flow controller (MFC)

Hitachi Metals FCPI 980

Manifold set: C4F8*50 SF6*500 N2*200 BCl3*200 ClF3*500 CL2*200 O2*5000 N2*10

Horiba STEC Stec SEC7330M

• Manufacturer: Horiba

O2 500sccm, Ar 100sccm valve unit Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

H2 100sccm Device name: Mass flow controller (MFC)

HORIBA STEC Stec SEC-7330

• Manufacturer: Horiba

H2 500sccm Device name: Mass flow controller (MFC)