Reactive ion etching system
Reactive ion etching system Project configuration and machine structure diagram Process result Silicon-based material etching Silicon-based materials, nano-imprint patterns, array patterns and lens pattern etchin...
Guangzhou, ChinaInductive coupling plasma etching (icp) system
Inductive coupling plasma etching (icp) system Project configuration and machine structure diagram Process result Quartz / silicon / grating etching Using BR mask to etch quartz or silicon materials, the grating ...
Guangzhou, China