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Gas N2 flow 500 SCCM W150 D40 H180 Device name: Mass flow controller
Gas SiH4 flow rate 300 SCCM W150 D40 H180 Device name: Mass flow controller
Gas CF4 flow rate 200 SCCM W130 D32 H127 Device name: Mass flow controller
Device name: Mass flow controller (MFC)
N2O 101SLM Device name: Mass flow controller (MFC)
NO 101SLM Device name: Mass flow controller (MFC)
O2 10SLM Device name: Mass flow controller (MFC)
H2 5SLM Device name: Mass flow controller (MFC)
Sih4 1SLM Device name: Mass flow controller (MFC)
H2,30SLM Device name: Mass flow controller (MFC)
Air,200sccm,SW Device name: Mass flow controller
CF4,10sccm VCR Device name: Mass flow controller
N2, 50sccm Device name: Mass flow controller
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan
Tokyo, Japan