Used automated in Nevada, USA

KLA Tencor MicroXAM-800 3D Benchtop Optical Wafer Surface Profiler Profilometer

• Manufacturer: KLA-Tencor

���The MicroXAM-800 is a white light interferometer-based optical profiler that measures nanometer-level features with phase scanning interferometry (PSI), and sub-micron to millimeter features with vertical scan...