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Used automation in Gyeonggi-do, South Korea

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    Brooks Automation / Zygo ZARIS

    • Manufacturer: Brooks

    Reticle Macro Inspection Tool, with Staubli Robot

    Yongin-si, South Korea
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    Brooks Automation, Inc. DMS M300

    • Manufacturer: Brooks

    Wafer size: 12"

    Yongin-si, South Korea
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    Brooks Automation, Inc. Irvine Optical Ultrasort 408

    • Manufacturer: Brooks

    Wafer size: 8"

    Yongin-si, South Korea
  • KLA-Tencor Archer 10

    KLA-Tencor Archer 10

    • Manufacturer: KLA-Tencor
    • Model: ARCHER 10

    Overlay Registration, Fully Automated, 200mm Wafers

    Yongin-si, South Korea
  • KLA-Tencor Prometrix RS75/a

    KLA-Tencor Prometrix RS75/a

    • Manufacturer: KLA-Tencor
    • Model: Prometrix RS75

    Four Point Probe, Automated, Up to 200mm, 3-D Plots, Contour Mapping

    Yongin-si, South Korea
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    KLA Tencor UV-1050

    • Manufacturer: KLA-Tencor
    • Model: UV-1050

    Fully automated measurement module, automated wafer handling / Windows NT user interface / 2 cassette loader for 1 specific wafer size

    Yongin-si, South Korea
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    AMAT OPAL 7830i

    • Manufacturer: Amat

    CD SEM, Automated

    Yongin-si, South Korea
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    KLA Tencor KT2401

    • Manufacturer: KLA-Tencor

    ILM2401 Automated Macro Defect Inspection System

    Yongin-si, South Korea