Used flow robotics in South Korea

GASONICS GASONIC L3510

• used

• Manufacturer: GaSonics

GASONIC L3510 Single Wafer Downstream Photoresist Asher 8” configured (can change to 6” ) Quartz Plasma Tube and Baffles ASTEX Microwave 1.2kw Temperature Controlled Wafer Cooled Aluminum Process Chamber ...