KLA-Tencor SP1-TBI Unpatterned Surface Inspection System
- Manufacturer: KLA-Tencor
- Model: SP1
KLA-Tencor's SP1 configured with KLA-Tencor's Trible-Beam Illumination (TBI). Specifications: Dual Dark Field Collection Channels. Sensitivity 60nm / 0.060µm. 0.001 ppm Haze Sensitivity. Argon Ion Laser (488nm. I...
San Jose, CA
KLA-Tencor SP1 Classic with single 200mm open cassette or single 300mm foup
- Manufacturer: KLA-Tencor
- Model: SP1
300/200mm wafers Dual Dark Field Collection Channels 0.079um Defect Sensitivity 0.001 ppm Haze Sensitivity Argon Ion Laser (488nm) Measurement Chamber with ULPA Filter and Blower Unit Operator Interface : MS Wind...
San Jose, CA
KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System
- Manufacturer: KLA-Tencor
- Model: Surfscan SP1
KLA Tencor Surfscan SP1-DLS Wafer Surface Analysis System set up for 200mm Edge Grip Handler. Cassette Open Handler System/SMIF/Dual Cassette. System refurbished to meet OEM Specifications. Features: Includes the...
San Jose, CA
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