Technics PEIIB Planar Etch Plasma System
- Manufacturer: Technics
Oxygen planar etcher may be used for surface activation and/or photoresist descum. Specifications: 10" parallel plate chamber 11" Electrode 500Watt @30Khz Two gas system Microprocessor controller
San Jose, CATechnics PEIIA PECVD / RIE System
- Manufacturer: Technics
The Technics PEII-A is a plasma etching system used for descumming/ashing of photoresist and nitride etching. Specifications: Parallel plate 15" chamber Microprocessor controller 11" electrode 500 Watt @ 30Khz Th...
San Jose, CA