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Used cluster in California, USA

  • Ulvac XeF2 release etch cluster

    Ulvac XeF2 release etch cluster tool FRE-200E

    • Manufacturer: Ulvac
    • Model: FRE-200E

    ULVAC - XeF2 Etch Release FRE-200E Manufacturer: ULVAC Model: FRE-200E Equipment Details: RF Power supply. Voltage: 208V Frequency: 60Hz Phase, Wire: 3Phase, 3Wire+ G Line Full Load Current: 142A Max Load(unit): ...

    Santa Barbara, CA