Used cluster

Lam Research Semiconductor Manufacturing

• Manufacturer: Lam Research - Novellus

Etch Alliance and Rainbow Alliance 4420XL, 4520XL and 4720XL series Exelan, ExelanHPT 9400 and 9600 Microwave Strip Key Features Cluster platform Wafer sizes up to 200mm Feature sizes from 0.25 to 0.18 micron Acc...