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PLASMA-THERM 790 Reactive Ion Etcher
- Manufacturer: Plasma-Therm
- Model: 790
- Manually Loaded Process Chamber with 8” (dia.) Cathode - Gas Distribution Panel with 4ea Gas Channels - MKS 1479 Metal Sealed Mass Flow Controllers - 4ea Additional Gas Channels Available - RFPP RF5S RF Generat...
United States