Used Etching Systems

Plasmatherm Chlorine Etcher

• Manufacturer: Plasma-Therm

Plasmatherm Chlorine Etcher Chlorine Etcher

Shibarua Chemical Drying Etcher

• Manufacturer: Unknown

Shibarua Chemical Drying Etcher Chemical Drying Etcher

STS Etcher

• Manufacturer: Unknown

STS Etcher Etcher

Tegal Etcher

• Manufacturer: Tegal

Tegal Etcher Etcher

Xactix XeF2 Silicon Etcher

• Manufacturer: Xactix

Xactix XeF2 Silicon Etcher XeF2 Silicon Etcher

200mm Metal Etcher HITACHI M-308

• Manufacturer: Hitachi

200mm Metal Etcher – HITACHI ‘M-308’

200mm Oxide etcher TEL TE-8500P ESC

• Manufacturer: Unknown

200mm Oxide etcher – TEL ‘TE-8500P ESC’

200mm Oxide etcher TEL Unity-IEM

• Manufacturer: Unknown

200mm Oxide etcher – TEL ‘Unity-IEM’

200mm Oxide etcher Canon-ANELVA ILD-4100SDII

• Manufacturer: Anelva

200mm Oxide etcher – Canon-ANELVA ‘ILD-4100SDII’

200mm Oxide etcher Canon-ANELVA ILD-4100SR

• Manufacturer: Anelva

200mm Oxide etcher – Canon-ANELVA ‘ILD-4100SR’

SEZ Backside Etcher

• Manufacturer: Unknown

SEZ Backside Etcher Backside Etcher

TRION Minilock single wafer RIE Etcher

• Manufacturer: Trion
• Model: MINILOCK

Single Wafer RIE Etcher with Loadlock, 200mm Wafers

LAM 490 Etcher

• Manufacturer: Lam Research - Novellus

Fully Rebuilt by Aspect systems. 6 gas inputs. ENI OEM6-XL power supply. Edwards Drystar pumping system: DP80 dry pump with EH-500 booster and 1400 controller

Etcher Inner Gate Valve Drive

• Manufacturer: Lam Research - Novellus

Semitool Spectrum Frame

• Manufacturer: Semitool
• Model: Spectrum

Spray Solvent Stripper Sat 1 Module. Sat 2 Module